|
名称Appellation |
简称Acronym |
纯度Purity |
|
氮 气 |
N2 |
5N5 / 6N |
99.9995% / 99.9999% |
|
|
氢 气 |
H2 |
5N / 6N |
99.999% / 99.9999% |
|
|
三氟化氮 |
NF3 |
5N |
99.999% |
|
|
氟 气 |
F2 |
5N |
99.999% |
|
|
高纯氨 |
NH3 |
5N |
99.999% |
|
|
硫化氢 |
H2S |
3N |
99.9% |
|
|
氯化氢 |
HCL |
4N5 |
99.995% |
|
|
氯 气 |
CL2 |
4N5 |
99.995% |
|
|
三氟化硼 |
BF3 |
2N5 |
99.5% |
|
|
三氯化硼 |
BCL3 |
4N5 |
99.995% |
|
|
四氟化碳 |
CF4 |
5N |
99.999% |
|
|
六氟化硫 |
SF6 |
4N |
99.99% |
|
|
笑气 |
N2O |
4N / 4N5 |
99.99% / 99.995% |
|
|
一氧化碳 |
NO |
2N |
99.0% |
|
|
氦气 |
He |
4N5 / 5N |
99.995% / 99.999% |
|
|
一氧化碳 |
CO |
3N |
99.9% |
|
|
二氧化碳 |
CO2 |
4N5 |
99.995% |
|
|
二氧化硫 |
SO2 |
3N |
99.9% |
|
|
硅烷 |
SiH4 |
5N |
99.999% |
|
|
磷烷 |
PH3 |
4N |
99.99% |
|
|
二氯二氢硅 |
SiCl2H2 |
2N |
99.0% |
|
|
环氧乙烷 |
C2H4O |
3N |
99.9% |
|
|
硼烷 |
B2H6 |
4N |
99.99% |
|
|
氧硫化碳 |
COS |
2N7 |
99.7% |
|
|
氩气 |
Ar |
5N |
99.999% |
|
|
氦气 |
He |
2N |
99.0% |
|
|
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